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National Repository of Grey Literature 2 records found  Search took 0.01 seconds. 
Gallium-nitride thin-film deposition on substrates structured by electron beam lithography
 Knotek, Miroslav ; Mach, Jindřich (referee) ; Voborný, Stanislav (advisor)
This bachelor's thesis deals with a fabrication of gallium nitride (GaN) thin films on silicon substrates, which were structured by electron beam lithography. In thesis, different resists for selective growth of nanostructures at elevated temperatures are examined.
Detailed record
Gallium-nitride thin-film deposition on substrates structured by electron beam lithography
 Knotek, Miroslav ; Mach, Jindřich (referee) ; Voborný, Stanislav (advisor)
This bachelor's thesis deals with a fabrication of gallium nitride (GaN) thin films on silicon substrates, which were structured by electron beam lithography. In thesis, different resists for selective growth of nanostructures at elevated temperatures are examined.
Detailed record

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